Method and apparatus for hydrogenation of thin film silicon on glass

Details for Australian Patent Application No. 2006254734 (hide)

Owner CSG Solar AG

Inventors Turner, Adrian Bruce; Keevers, Mark John

Agent FB Rice

Pub. Number AU-A-2006254734

PCT Pub. Number WO2006/128247

Priority 2005902865 03.06.05 AU

Filing date 2 June 2006

Wipo publication date 7 December 2006

International Classifications

H01L 21/02 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/324 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 November 2007 PCT application entered the National Phase

  PCT publication WO2006/128247 Priority application(s): WO2006/128247

12 January 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(d). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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