Apparatus and method for coating a substrate

Details for Australian Patent Application No. 2006254452 (hide)

Owner Corus Technology BV

Inventors Gleijm, Gerardus; Schade Van Westrum, Johannes Alphonsus Franciscus Maria; Baptiste, Laurent Christophe Bernard

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2006254452

PCT Pub. Number WO2006/128532

Priority 05076265.7 31.05.05 EP

Filing date 27 April 2006

Wipo publication date 7 December 2006

Acceptance publication date 18 November 2010

International Classifications

C23C 14/24 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C23C 14/22 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the process of coating

C23C 14/26 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by resistance or inductive heating of the source

Event Publications

15 November 2007 PCT application entered the National Phase

  PCT publication WO2006/128532 Priority application(s): WO2006/128532

18 November 2010 Application Accepted

  Published as AU-B-2006254452

17 February 2011 Alteration of Name

  The name of the applicant has been altered to Tata Steel Nederland Technology B.V.

17 March 2011 Standard Patent Sealed

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