Device and method for application of an even thin fluid layer to substrates

Details for Australian Patent Application No. 2006237053 (hide)

Owner Schmid Technology Systems GmbH

Inventors Buchner, Christian; Kalmbach, Helmut; Gentischer, Josef; Brunner, Johann

Agent Watermark

Pub. Number AU-B-2006237053

PCT Pub. Number WO2006/111247

Priority 10 2005 019 686.1 22.04.05 DE

Filing date 27 March 2006

Wipo publication date 26 October 2006

Acceptance publication date 2 June 2011

International Classifications

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

15 November 2007 PCT application entered the National Phase

  PCT publication WO2006/111247 Priority application(s): WO2006/111247

2 June 2011 Application Accepted

  Published as AU-B-2006237053

7 July 2011 Corrigenda

  Applications Accepted - Name Index Under the name Schmid Technology Systems GmbH, Application No. 2006237053, under INID (22) correct the filing date to 28.03.2006

29 September 2011 Standard Patent Sealed

25 October 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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