Multi-layer structure having a predetermined layer pattern including an agent

Details for Australian Patent Application No. 2006235565 (hide)

Owner The Board of Trustees of the Leland Stanford Junior University

Inventors Ryu, WonHyoung; Fasching, Rainer J.; Greco, Ralph S.; Prinz, Friedrich B.

Agent Eagar & Buck

Pub. Number AU-A-2006235565

PCT Pub. Number WO2006/110889

Priority 60/670,483 11.04.05 US

Filing date 11 April 2006

Wipo publication date 19 October 2006

International Classifications

H01L 21/30 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 October 2007 PCT application entered the National Phase

  PCT publication WO2006/110889 Priority application(s): WO2006/110889

3 November 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(d). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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