Method of preparing zinc oxide nanorods on a substrate by chemical spray pyrolysis

Details for Australian Patent Application No. 2006233503 (hide)

Owner Tallinn University of Technology

Inventors Dedova, Tatjana; Oja, Ilona; Krunks, Malle

Agent A.P.T. Patent and Trade Mark Attorneys

Pub. Number AU-A-2006233503

PCT Pub. Number WO2006/108425

Priority 60/671,232 14.04.05 US

Filing date 13 April 2006

Wipo publication date 19 October 2006

International Classifications

H01L 21/368 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 December 2007 PCT application entered the National Phase

  PCT publication WO2006/108425 Priority application(s): WO2006/108425

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