Plasmas and methods of using them

Details for Australian Patent Application No. 2006223254 (hide)

Owner Perkinelmer, Inc.

Inventors Morrisroe, Peter J.

Agent Davies Collison Cave

Pub. Number AU-B-2006223254

PCT Pub. Number WO2006/099190

Priority 60/661,095 11.03.05 US

Filing date 10 March 2006

Wipo publication date 21 September 2006

Acceptance publication date 26 April 2012

International Classifications

B23K 9/00 (2006.01) Electric welding or cutting

B23K 10/02 (2006.01) Welding or cutting by means of a plasma - Plasma welding

G01J 3/30 (2006.01) Spectrometry - Measuring the intensity of spectral lines directly on the spectrum itself

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/306 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/336 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 August 2007 PCT application entered the National Phase

  PCT publication WO2006/099190 Priority application(s): WO2006/099190

26 April 2012 Assignment before Grant

  Perkinelmer, Inc. The application has been assigned to Perkinelmer Health Sciences, Inc.

26 April 2012 Application Accepted

  Published as AU-B-2006223254

23 August 2012 Standard Patent Sealed

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