Piezoelectric micromachined ultrasonic transducer with air-backed cavities

Details for Australian Patent Application No. 2006218723 (hide)

International Classifications

Event Publications

20 September 2007 PCT application entered the National Phase

PCT publication WO2006/093913 Priority application(s): WO2006/093913

14 July 2011 Application Accepted

Published as AU-B-2006218723

10 November 2011 Standard Patent Sealed

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