Method of manufacturing a hermetic chamber with electrical feedthroughs

Details for Australian Patent Application No. 2006213091 (hide)

Owner CardioMEMs, Inc.

Inventors Park, Jin Woo; Cros, Florent; Fonseca, Michael; You, Liang; Allen, Mark; O'Brian, David

Agent Pizzeys

Pub. Number AU-A-2006213091

PCT Pub. Number WO2006/086114

Priority 60/651,670 10.02.05 US; 60/653,868 17.02.05 US

Filing date 13 January 2006

Wipo publication date 17 August 2006

International Classifications

H01L 21/66 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/44 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/50 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 23/02 (2006.01) Details of semiconductor or other solid state devices - Containers

Event Publications

30 August 2007 PCT application entered the National Phase

  PCT publication WO2006/086114 Priority application(s): WO2006/086114

11 August 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(d). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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