Improved micro-electrical-mechanical variable capacitor device and method of making same
Details for Australian Patent Application No. 2006205200 (hide)
International Classifications
Event Publications
11 January 2007 PCT application entered the National Phase
PCT publication WO2006/076182 Priority application(s): WO2006/076182
22 October 2009 Application Accepted
Published as AU-B-2006205200
18 February 2010 Standard Patent Sealed
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