Precoating and coating sequence for DC PACVD

Details for Australian Patent Application No. 2006202216 (hide)

Owner Commonwealth Scientific and Industrial Research Organisation

Inventors Bendavid, Avi; Martin, Phil J; Gross, Mark; Preston, Edward

Agent Shelston IP

Filing date 25 May 2006

Event Publications

15 June 2006 Complete Application Filed

14 June 2007 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  Application withdrawn under section 141(1). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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