Hierarchical nanopatterns by nanoimprint lithography

Details for Australian Patent Application No. 2005337438 (hide)

Owner Agency for Science, Technology & Research

Inventors Low, Hong Yee; Zhang, Fengxiang

Agent Spruson & Ferguson

Pub. Number AU-B-2005337438

PCT Pub. Number WO2007/046772

Filing date 20 October 2005

Wipo publication date 26 April 2007

Acceptance publication date 18 February 2010

International Classifications

B82B 3/00 (2006.01) Manufacture or treatment of nano-structures

B29C 59/02 (2006.01) Surface shaping, e.g. embossing - by mechanical means, e.g. pressing

G03F 7/00 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

22 May 2008 PCT application entered the National Phase

  PCT publication WO2007/046772 Priority application(s): WO2007/046772

18 February 2010 Application Accepted

  Published as AU-B-2005337438

17 June 2010 Standard Patent Sealed

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