Method of fabricating suspended beam in a mems process
Details for Australian Patent Application No. 2005337420 (hide)
International Classifications
Event Publications
10 April 2008 PCT application entered the National Phase
PCT publication WO2007/041748 Priority application(s): WO2007/041748
29 October 2009 Application Accepted
Published as AU-B-2005337420
25 February 2010 Standard Patent Sealed
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