Method of fabricating suspended beam in a mems process

Details for Australian Patent Application No. 2005337420 (hide)

Owner Silverbrook Research Pty Ltd

Inventors Silverbrook, Kia

Agent Silverbrook Research Pty Ltd

Pub. Number AU-B-2005337420

PCT Pub. Number WO2007/041748

Filing date 10 October 2005

Wipo publication date 19 April 2007

Acceptance publication date 29 October 2009

International Classifications

B81C 1/00 (2006.01) Manufacture or treatment of devices or systems in or on a substrate

B41J 2/05 (2006.01) Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed - produced by the application of heat

B41J 2/16 (2006.01) Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed - Production of nozzles

Event Publications

10 April 2008 PCT application entered the National Phase

  PCT publication WO2007/041748 Priority application(s): WO2007/041748

29 October 2009 Application Accepted

  Published as AU-B-2005337420

25 February 2010 Standard Patent Sealed

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