Contact doping and annealing systems and processes for nanowire thin films

Details for Australian Patent Application No. 2005309906 (hide)

Owner Nanosys, Inc.

Inventors Stumbo, David P.; Pan, Yaoling

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2005309906

PCT Pub. Number WO2006/057818

Priority 60/630,743 24.11.04 US

Filing date 10 November 2005

Wipo publication date 1 June 2006

Acceptance publication date 9 December 2010

International Classifications

B82B 1/00 (2006.01) Nano-structures

B82B 3/00 (2006.01) Manufacture or treatment of nano-structures

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 May 2007 PCT application entered the National Phase

  PCT publication WO2006/057818 Priority application(s): WO2006/057818

9 December 2010 Application Accepted

  Published as AU-B-2005309906

7 April 2011 Standard Patent Sealed

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