Vacuum processing chamber for very large area substrates
Details for Australian Patent Application No. 2005309226 (hide)
International Classifications
Event Publications
26 April 2007 PCT application entered the National Phase
PCT publication WO2006/056091 Priority application(s): WO2006/056091
3 June 2010 Application Accepted
Published as AU-B-2005309226
30 September 2010 Standard Patent Sealed
22 December 2011 Assignment Registered
OC Oerlikon Balzers AG The patent has been assigned to Oerlikon Solar AG, Truebbach
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