Vacuum processing chamber for very large area substrates

Details for Australian Patent Application No. 2005309226 (hide)

Owner OC Oerlikon Balzers AG

Inventors Delaunay, Laurent; Elyaakoubi, Mustapha; Jost, Stephan; Aing, Phannara

Agent Spruson & Ferguson

Pub. Number AU-B-2005309226

PCT Pub. Number WO2006/056091

Priority 60/630,667 24.11.04 US

Filing date 23 November 2005

Wipo publication date 1 June 2006

Acceptance publication date 3 June 2010

International Classifications

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

C23C 16/458 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

C23C 16/509 (2006.01) Chemical deposition or plating by decomposition

Event Publications

26 April 2007 PCT application entered the National Phase

  PCT publication WO2006/056091 Priority application(s): WO2006/056091

3 June 2010 Application Accepted

  Published as AU-B-2005309226

30 September 2010 Standard Patent Sealed

22 December 2011 Assignment Registered

  OC Oerlikon Balzers AG The patent has been assigned to Oerlikon Solar AG, Truebbach

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2005309230-Flat element for thermal adjustment of indoor air

2005309224-Security document comprising a light source and a light-processing device