Focussing mask

Details for Australian Patent Application No. 2005305612 (hide)

Owner NFAB Limited

Inventors Eastham, Derek Antony

Agent Callinan

Pub. Number AU-A-2005305612

PCT Pub. Number WO2006/054086

Priority 0425290.4 17.11.04 GB

Filing date 17 November 2005

Wipo publication date 26 May 2006

International Classifications

H01J 37/317 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

24 May 2007 PCT application entered the National Phase

  PCT publication WO2006/054086 Priority application(s): WO2006/054086

23 April 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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