Impedance matching of a capacitively coupled RF plasma reactor suitable for large area substrates

Details for Australian Patent Application No. 2005304253 (hide)

Owner Oerlikon Solar AG

Inventors Belinger, Andy

Agent Spruson & Ferguson

Pub. Number AU-B-2005304253

PCT Pub. Number WO2006/050632

Priority 60/627,784 12.11.04 US

Filing date 11 November 2005

Wipo publication date 18 May 2006

Acceptance publication date 23 December 2010

International Classifications

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

26 April 2007 PCT application entered the National Phase

  PCT publication WO2006/050632 Priority application(s): WO2006/050632

23 December 2010 Application Accepted

  Published as AU-B-2005304253

20 January 2011 Corrigenda

  Applications Accepted - Name Index Under the name Oerlikon Solar AG, Application No. 2005304253, under INID (71) correct the applicant name to Oerlikon Solar AG Trubbach

21 April 2011 Standard Patent Sealed

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