Method and apparatus for growing a group (III) metal nitride film and a group (III) metal nitride film

Details for Australian Patent Application No. 2005289367 (hide)

Owner Gallium Enterprises Pty Ltd

Inventors Ten Have, John Leo Paul; Wintrebert Et Fouquet, Marie-Pierre Francoise; Johnson, David Ian; Chen, Patrick Po-Tsang; Butcher, Kenneth Scott Alexander

Agent Fisher Adams Kelly

Pub. Number AU-B-2005289367

PCT Pub. Number WO2006/034540

Priority 60/613,910 27.09.04 US; 2005903494 01.07.05 AU; 2005904919 07.09.05 AU

Filing date 27 September 2005

Wipo publication date 6 April 2006

Acceptance publication date 3 December 2009

International Classifications

C23C 16/34 (2006.01) Chemical deposition or plating by decomposition - Nitrides

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 May 2007 PCT application entered the National Phase

  PCT publication WO2006/034540 Priority application(s): WO2006/034540

3 December 2009 Application Accepted

  Published as AU-B-2005289367

1 April 2010 Standard Patent Sealed

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