MEMS device and interposer and method for integrating MEMS device and interposer

Details for Australian Patent Application No. 2005275206 (hide)

Owner The Charles Stark Draper Laboratory, Inc.

Inventors Sawyer, William D.

Agent Davies Collison Cave

Pub. Number AU-B-2005275206

PCT Pub. Number WO2006/019761

Priority 10/889,868 13.07.04 US

Filing date 13 July 2005

Wipo publication date 23 February 2006

Acceptance publication date 9 February 2012

International Classifications

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/58 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 29/84 (2006.01) Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

8 March 2007 PCT application entered the National Phase

  PCT publication WO2006/019761 Priority application(s): WO2006/019761

9 February 2012 Application Accepted

  Published as AU-B-2005275206

7 June 2012 Standard Patent Sealed

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