Substrate Processing System, Method Of Confirmation Of Its State Of Use, And Method Of Prevention Of Illicit Use

Details for Australian Patent Application No. 2005272460 (hide)

Owner Nikon Corporation Nikon Systems Inc.

Inventors Okita, Shinichi; Yamaguchi, Tadashi; Suzuki, Hiroyuki

Agent Griffith Hack

Pub. Number AU-B-2005272460

PCT Pub. Number WO2006/016619

Priority 2004-235216 12.08.04 JP

Filing date 10 August 2005

Wipo publication date 16 February 2006

Acceptance publication date 22 March 2012

International Classifications

H01L 21/027 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 7/20 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G05B 19/418 (2006.01) Programme-control systems - Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)

G06F 21/22 (2006.01) Security arrangements for protecting computers or computer systems against unauthorised activity

H01L 21/02 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

15 March 2007 PCT application entered the National Phase

  PCT publication WO2006/016619 Priority application(s): WO2006/016619

22 March 2007 Amendment Made

  The nature of the amendment is as shown in the statement(s) filed 21 Feb 2007

23 December 2010 Amendment Made

  The nature of the amendment is: Amend invention title to read Substrate Processing System, Method Of Confirmation Of Its State Of Use, And Method Of Prevention Of Illicit Use 2006

22 March 2012 Application Accepted

  Published as AU-B-2005272460

19 July 2012 Standard Patent Sealed

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