Silicon manufacturing apparatus

Details for Australian Patent Application No. 2005272378 (hide)

Owner Tokuyama Corporation

Inventors Nakashima, Junichirou; Sugimura, Shigeki; Wakamatsu, Satoru

Agent Davies Collison Cave

Pub. Number AU-A-2005272378

PCT Pub. Number WO2006/016626

Priority 2004-234351 11.08.04 JP

Filing date 10 August 2005

Wipo publication date 16 February 2006

International Classifications

C01B 33/03 (2006.01) Silicon

Event Publications

5 April 2007 PCT application entered the National Phase

  PCT publication WO2006/016626 Priority application(s): WO2006/016626

10 March 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(d). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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