Plasma nozzle array for providing uniform scalable microwave plasma generation

Details for Australian Patent Application No. 2005269581 (hide)

Owner Amarante Technologies, Inc. Noritsu Koki Co., Ltd.

Inventors Kim, Jay Joongsoo; Lee, Sang Hun

Agent Pizzeys

Pub. Number AU-B-2005269581

PCT Pub. Number WO2006/014862

Priority 10/902,435 30.07.04 US

Filing date 21 July 2005

Wipo publication date 9 February 2006

Acceptance publication date 16 July 2009

International Classifications

H05H 1/46 (2006.01) Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

22 February 2007 PCT application entered the National Phase

  PCT publication WO2006/014862 Priority application(s): WO2006/014862

16 July 2009 Application Accepted

  Published as AU-B-2005269581

12 November 2009 Standard Patent Sealed

2 September 2010 Assignment Registered

  Amarante Technologies, Inc.; Noritsu Koki Co., Ltd. The patent has been assigned to Amarante Technologies, Inc.; Saian Corporation

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