Silicon wafer substrate locking stage and silicon wafer substrate temperature measuring method
Details for Australian Patent Application No. 2005264615 (hide)
International Classifications
Event Publications
15 February 2007 PCT application entered the National Phase
PCT publication WO2006/009278 Priority application(s): WO2006/009278
25 March 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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