Owner Owens Technology, Inc.

Inventors Owens, Gary

Agent Davies Collison Cave

Pub. Number AU-B-2005253577

PCT Pub. Number WO2005/122243

Priority 60/576,888 03.06.04 US; 11/144,465 02.06.05 US

Filing date 3 June 2005

Wipo publication date 22 December 2005

Acceptance publication date 7 April 2011

B26F 3/00 (2006.01) Severing by means other than cutting

B28D 1/22 (2006.01) Working stone or stone-like materials, e.g. brick, concrete, not provided for elsewhere - by cutting, e.g. incising

B28D 5/04 (2006.01) Fine working of gems, jewels, crystals, e.g. of semiconductor material - by tools other than of rotary type, e.g. reciprocating tools

H01L 21/304 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/46 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/463 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/78 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof