Bubbler for constant vapor delivery of a solid chemical

Details for Australian Patent Application No. 2005245634 (hide)

Owner Akzo Nobel N.V.

Inventors El-Zein, Nada; Deavenport, Dennis Leon; Ko, Taeho; Tran, Nam Hung

Agent Spruson & Ferguson

Pub. Number AU-B-2005245634

PCT Pub. Number WO2005/113857

Priority 60/572,687 20.05.04 US

Filing date 17 May 2005

Wipo publication date 1 December 2005

Acceptance publication date 1 July 2010

International Classifications

C23C 16/448 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Event Publications

1 February 2007 PCT application entered the National Phase

  PCT publication WO2005/113857 Priority application(s): WO2005/113857

1 July 2010 Application Accepted

  Published as AU-B-2005245634

28 October 2010 Standard Patent Sealed

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