Owner Japan Science and Technology Agency

Inventors Kawamoto, Hiroshi

Agent Madderns

Pub. Number AU-A-2005234303

PCT Pub. Number WO2005/101475

Priority 2004-116925 12.04.04 JP

Filing date 11 April 2005

Wipo publication date 27 October 2005

H01L 21/3205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/822 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 25/065 (2006.01) Assemblies consisting of a plurality of individual semiconductor or other solid state devices - the devices being of a type provided for in group

H01L 25/07 (2006.01) Assemblies consisting of a plurality of individual semiconductor or other solid state devices - the devices being of a type provided for in group

H01L 25/18 (2006.01) Assemblies consisting of a plurality of individual semiconductor or other solid state devices - the devices being of types provided for in two or more different subgroups of the same main group of groups

H01L 27/04 (2006.01) Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being a semiconductor body