Device for coating both sides of a substrate with a hydrophobic layer

Details for Australian Patent Application No. 2005231941 (hide)

Owner Carl Zeiss Vision GmbH Leybold Optics GmbH

Inventors Wicht, Manfred; Fuhr, Markus; Winter, Karl-Heinz; Zultzke, Walter

Agent Wrays

Pub. Number AU-A-2005231941

PCT Pub. Number WO2005/098082

Priority 10 2004 018 435.6 06.04.04 DE

Filing date 1 April 2005

Wipo publication date 20 October 2005

International Classifications

C23C 14/24 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C23C 14/50 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

Event Publications

16 November 2006 PCT application entered the National Phase

  PCT publication WO2005/098082 Priority application(s): WO2005/098082

24 July 2008 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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