Transparent and conductive oxide layer, production and use thereof in a thin film solar cell

Details for Australian Patent Application No. 2005206242 (hide)

Owner Forschungszentrum Julich GmbH

Inventors Hupkes, Jurgen; Kluth, Oliver; Mueller, Joachim; Rech, Bernd

Agent Davies Collison Cave

Pub. Number AU-B-2005206242

PCT Pub. Number WO2005/071131

Priority 10 2004 003 760.4 23.01.04 DE

Filing date 18 January 2005

Wipo publication date 4 August 2005

Acceptance publication date 1 July 2010

International Classifications

C23C 14/00 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation

C23C 14/08 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

Event Publications

31 August 2006 PCT application entered the National Phase

  PCT publication WO2005/071131 Priority application(s): WO2005/071131

1 July 2010 Application Accepted

  Published as AU-B-2005206242

28 October 2010 Standard Patent Sealed

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