Method of making prestructure for MEMS systems

Details for Australian Patent Application No. 2005205849 (hide)

Owner IDC, LLC

Inventors Sampsell, Jeffrey B

Agent Madderns

Pub. Number AU-A-2005205849

Priority 11/134490 20.05.05 US; 60/613411 27.09.04 US

Filing date 7 September 2005

Wipo publication date 13 April 2006

International Classifications

B81C 1/00 (2006.01) Manufacture or treatment of devices or systems in or on a substrate

G02B 26/00 (2006.01) Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating

Event Publications

22 September 2005 Complete Application Filed

  Priority application(s): 11/134490 20.05.05 US; 60/613411 27.09.04 US

13 April 2006 Application Open to Public Inspection

  Published as AU-A-2005205849

26 March 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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