System and method for protecting microelectromechanical systems array using back-plate with non-flat portion

Details for Australian Patent Application No. 2005203548 (hide)

International Classifications

Event Publications

25 August 2005 Complete Application Filed

Priority application(s): 60/613408 27.09.04 US; 11/090481 25.03.05 US

13 April 2006 Application Open to Public Inspection

Published as AU-A-2005203548

26 March 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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