System and method for protecting microelectromechanical systems array using back-plate with non-flat portion

Details for Australian Patent Application No. 2005203548 (hide)

Owner IDC, LLC

Inventors Cummings, William J; Gally, Brian James; Palmateer, Lauren

Agent Madderns

Pub. Number AU-A-2005203548

Priority 60/613408 27.09.04 US; 11/090481 25.03.05 US

Filing date 10 August 2005

Wipo publication date 13 April 2006

International Classifications

H01L 23/13 (2006.01) Details of semiconductor or other solid state devices

Event Publications

25 August 2005 Complete Application Filed

  Priority application(s): 60/613408 27.09.04 US; 11/090481 25.03.05 US

13 April 2006 Application Open to Public Inspection

  Published as AU-A-2005203548

26 March 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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