Method and system for xenon fluoride etching with enhanced efficiency

Details for Australian Patent Application No. 2005203346 (hide)

Owner IDC, LLC

Inventors Cummings, William J; Floyd, Philip D

Agent Madderns

Pub. Number AU-A-2005203346

Priority 11/083,030 17.03.05 US; 60/613,423 27.09.04 US

Filing date 29 July 2005

Wipo publication date 13 April 2006

International Classifications

B81C 1/00 (2006.01) Manufacture or treatment of devices or systems in or on a substrate

C23F 1/10 (2006.01) Etching metallic material by chemical means - Etching compositions

C23F 1/12 (2006.01) Etching metallic material by chemical means

Event Publications

18 August 2005 Complete Application Filed

  Priority application(s): 11/083,030 17.03.05 US; 60/613,423 27.09.04 US

13 April 2006 Application Open to Public Inspection

  Published as AU-A-2005203346

26 March 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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