Portable etch chamber

Details for Australian Patent Application No. 2005203283 (hide)

Owner IDC, LLC

Inventors Cummings, William J; Floyd, Philip D; Arbuckle, Brian W

Agent Madderns

Pub. Number AU-A-2005203283

Priority 60/613,417 27.09.04 US; 11/045,588 28.01.05 US

Filing date 27 July 2005

Wipo publication date 13 April 2006

International Classifications

H01L 21/306 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B81C 1/00 (2006.01) Manufacture or treatment of devices or systems in or on a substrate

Event Publications

11 August 2005 Complete Application Filed

  Priority application(s): 60/613,417 27.09.04 US; 11/045,588 28.01.05 US

13 April 2006 Application Open to Public Inspection

  Published as AU-A-2005203283

26 March 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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