Configurable vacuum system and method

Details for Australian Patent Application No. 2005202627 (hide)

Owner Nova Machine Products, Inc.

Inventors Kidd, Jerry D.; Harrington, Craig D.; Hopkins, Daniel N.

Agent Davies Collison Cave

Pub. Number AU-B-2005202627

Parent 2001264853

Filing date 16 June 2005

Wipo publication date 7 July 2005

Acceptance publication date 13 March 2008

International Classifications

C23C 14/24 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C23C 14/26 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by resistance or inductive heating of the source

C23C 14/32 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by explosion

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C23C 14/50 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

30 June 2005 Complete Application Filed

7 July 2005 Application Open to Public Inspection

  Published as AU-B-2005202627

6 March 2008 Assignment before Grant

  Basic Resource, Inc. The application has been assigned to Nova Machine Products, Inc.

13 March 2008 Application Accepted

  Published as AU-B-2005202627

18 December 2008 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(d). This application has been accepted or advertised accepted. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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