Plasma enhanced chemical vapor deposition apparatus and method

Details for Australian Patent Application No. 2004323359 (hide)

Owner Gen 3 Solar, Inc.

Inventors Keshner, Marvin S.; McClelland, Paul H.

Agent Davies Collison Cave

Pub. Number AU-A-2004323359

PCT Pub. Number WO2006/031234

Filing date 14 September 2004

Wipo publication date 23 March 2006

International Classifications

C23C 16/54 (2006.01) Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

Event Publications

21 September 2006 PCT application entered the National Phase

  PCT publication WO2006/031234 Priority application(s): WO2006/031234

8 March 2007 Change of Name(s) of Applicant(s), Section 104

  Gen 3 Solar, Inc. The name of the applicant has been changed to OptiSolar, Inc. 2005

8 April 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(d). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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