Plasma processing method and system therefor

Details for Australian Patent Application No. 2004319231 (hide)

Owner Pearl Kogyo Co., Ltd.

Inventors Saeki, Noboru

Agent Davies Collison Cave

Pub. Number AU-A-2004319231

PCT Pub. Number WO2005/107341

Priority 2004-040272 17.02.04 JP

Filing date 30 August 2004

Wipo publication date 10 November 2005

International Classifications

H01T 19/00 (2006.01) Devices providing for corona discharge

B01J 19/08 (2006.01) Chemical, physical, or physico-chemical processes in general - Processes employing the direct application of electric or wave energy, or particle radiation

C08J 7/00 (2006.01) Chemical treatment or coating of shaped articles made of macromolecular substances

H01L 21/304 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/3065 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H05H 1/24 (2006.01) Generating plasma - Generating plasma

H05H 1/46 (2006.01) Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

Event Publications

17 August 2006 PCT application entered the National Phase

  PCT publication WO2005/107341 Priority application(s): WO2005/107341

29 January 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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