Methods and systems for providing MEMS devices with a top cap and upper sense plate

Details for Australian Patent Application No. 2004314333 (hide)

International Classifications

Event Publications

27 April 2006 PCT application entered the National Phase

PCT publication WO2005/070817 Priority application(s): WO2005/070817

11 September 2008 Application Accepted

Published as AU-B-2004314333

22 January 2009 Standard Patent Sealed

13 May 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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