Method for depositing silicon carbide and ceramic films

Details for Australian Patent Application No. 2004291847 (hide)

Owner Case Western Reserve University

Inventors Mehregany, Mehran; Fu, Xiao-An; Zorman, Christian A.; Dunning, Jeremy L.

Agent Callinan

Pub. Number AU-A-2004291847

PCT Pub. Number WO2005/049884

Priority 10/716,006 18.11.03 US

Filing date 5 November 2004

Wipo publication date 2 June 2005

International Classifications

G02B 26/08 (2006.01) Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

B81B 3/00 (2006.01) Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

C23C 16/32 (2006.01) Chemical deposition or plating by decomposition - Carbides

C23C 16/52 (2006.01) Chemical deposition or plating by decomposition - Controlling or regulating the coating process

H01L 21/04 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

22 June 2006 PCT application entered the National Phase

  PCT publication WO2005/049884 Priority application(s): WO2005/049884

7 February 2008 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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