Process for manufacturing devices which require a non evaporable getter material for their working

Details for Australian Patent Application No. 2004288886 (hide)

Owner SAES Getters S.P.A.

Inventors Dragoni, Costanza; Palladino, Massimo; Moraja, Marco; Amiotti, Marco

Agent Davies Collison Cave

Pub. Number AU-B-2004288886

PCT Pub. Number WO2005/047558

Priority MI2003A002209 14.11.03 IT

Filing date 9 November 2004

Wipo publication date 26 May 2005

Acceptance publication date 12 June 2008

International Classifications

B81B 7/00 (2006.01) Micro-structural systems

C23G 1/10 (2006.01) Cleaning or pickling metallic material with solutions or molten salts

C23G 1/20 (2006.01) Cleaning or pickling metallic material with solutions or molten salts

C23C 14/58 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - After-treatment

Event Publications

16 March 2006 PCT application entered the National Phase

  PCT publication WO2005/047558 Priority application(s): WO2005/047558

12 June 2008 Application Accepted

  Published as AU-B-2004288886

9 October 2008 Standard Patent Sealed

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