Plasma immersion ion implantation using conductive mesh

Details for Australian Patent Application No. 2004286361 (hide)

International Classifications

Event Publications

11 May 2006 PCT application entered the National Phase

PCT publication WO2005/043580 Priority application(s): WO2005/043580

28 May 2009 Application Accepted

Published as AU-B-2004286361

8 October 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under reg. 22.2I(2). This application has been accepted or advertised accepted. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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