Photoresist compositions comprising diamondoid derivatives

Details for Australian Patent Application No. 2004281038 (hide)

Owner Chevron U.S.A. Inc.

Inventors Dahl, Jeremy E.; Carlson, Robert M.; Liu, Shenggao

Agent Davies Collison Cave

Pub. Number AU-A-2004281038

PCT Pub. Number WO2005/036265

Priority 10/764,407 23.01.04 US; 60/508,222 01.10.03 US

Filing date 29 September 2004

Wipo publication date 21 April 2005

International Classifications

G03C 1/76 (2006.01) Photosensitive materials - Photosensitive materials characterised by the base or auxiliary layers

Event Publications

27 April 2006 PCT application entered the National Phase

  PCT publication WO2005/036265 Priority application(s): WO2005/036265

4 September 2008 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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