Fabricating nanoscale and atomic scale devices

Details for Australian Patent Application No. 2004266178 (hide)

Owner Qucor Pty Ltd

Inventors Curson, Neil Jonathan; Goh, K. E. Johnson; Brenner, Rolf; Simmons, Michelle Yvonne; Ruess, Frank J.; Mitic, Mladen; Hallam, Toby; Hamilton, Alexander Rudolf; Oberbeck, Lars

Agent FB Rice

Pub. Number AU-B-2004266178

PCT Pub. Number WO2005/019095

Priority 2003904492 20.08.03 AU; 2004902143 22.04.04 AU

Filing date 20 August 2004

Wipo publication date 3 March 2005

Acceptance publication date 4 March 2010

International Classifications

B82B 1/00 (2006.01) Nano-structures

B82B 3/00 (2006.01) Manufacture or treatment of nano-structures

H01L 21/335 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 23/544 (2006.01) Details of semiconductor or other solid state devices - Marks applied to semiconductor devices, e.g. registration marks, test patterns

Event Publications

23 March 2006 PCT application entered the National Phase

  PCT publication WO2005/019095 Priority application(s): WO2005/019095

4 March 2010 Application Accepted

  Published as AU-B-2004266178

1 July 2010 Standard Patent Sealed

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