Abrasive particles for chemical mechanical polishing

Details for Australian Patent Application No. 2004257233 (hide)

Owner W.R. Grace & Co.-Conn.

Inventors Chu, Jia-Ni; Pryor, James Neil

Agent Davies Collison Cave

Pub. Number AU-A-2004257233

PCT Pub. Number WO2005/007770

Priority 60/486,686 11.07.03 US

Filing date 9 July 2004

Wipo publication date 27 January 2005

International Classifications

C09K 3/14 (2006.01) Materials not provided for elsewhere - Anti-slip materials

C09G 1/02 (2006.01) Polishing compositions

H01L 21/321 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 February 2006 PCT application entered the National Phase

  PCT publication WO2005/007770 Priority application(s): WO2005/007770

3 March 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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