System and method for buried electrical feedthroughs in a glass-silicon MEMS process

Details for Australian Patent Application No. 2004220026 (hide)

International Classifications

Event Publications

6 October 2005 PCT application entered the National Phase

PCT publication WO2004/080888 Priority application(s): WO2004/080888

12 June 2008 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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