Micromachined assembly with a multilayer cap defining cavity

Details for Australian Patent Application No. 2004216038 (hide)

International Classifications

Event Publications

13 October 2005 PCT application entered the National Phase

PCT publication WO2004/077523 Priority application(s): WO2004/077523

5 July 2007 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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