THIN SHEET-LIKE ARTICLE DISPLACEMENT DETECTION METHOD AND DISPLACEMENT CORRECTION METHOD

Details for Australian Patent Application No. 2003304309 (hide)

Owner RORZE CORPORATION

Inventors SAKIYA, Fumio

Pub. Number AU-A-2003304309

PCT Number PCT/JP2003/0086

PCT Pub. Number WO2005/004227

Filing date 7 July 2003

Wipo publication date 21 January 2005

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B65G 049/06 Conveying systems characterised by their application for specified purposes not otherwise provided for

B25J 013/08 Controls for manipulators - by means of sensing devices, e.g. viewing or touching devices

Event Publications

24 February 2005 Complete Application Filed

3 March 2005 Application Open to Public Inspection

  Published as AU-A-2003304309

23 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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