DEVICE FOR THE POLARIZATION-SPECIFIC EXAMINATION OF AN OPTICAL SYSTEM

Details for Australian Patent Application No. 2003304304 (hide)

Owner CARL ZEISS SMT AG

Inventors MENGEL, Markus; WEGMANN, Ulrich

Pub. Number AU-A-2003304304

PCT Number PCT/EP2003/0072

PCT Pub. Number WO2005/003862

Filing date 5 July 2003

Wipo publication date 21 January 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G01J 004/00 Measuring polarisation of light

Event Publications

24 February 2005 Complete Application Filed

3 March 2005 Application Open to Public Inspection

  Published as AU-A-2003304304

23 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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