PULSED ION BEAM CONTROL OF SOLID STATE FEATURES

Details for Australian Patent Application No. 2003304247 (hide)

Owner PRESIDENT AND FELLOWS OF HARVARD COLLEGE

Inventors GOLOVCHENKO, Jene, A.; STEIN, Derek, M.; LI, Jiali

Pub. Number AU-A-2003304247

PCT Number PCT/US2003/0341

PCT Pub. Number WO2005/000732

Priority 60/421,908 29.10.02 US

Filing date 28 October 2003

Wipo publication date 13 January 2005

International Classifications

B81B 001/00 Devices without movable or flexible elements, e.g. micro-capillary devices

B81C 005/00

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

17 February 2005 Complete Application Filed

  Priority application(s): 60/421,908 29.10.02 US

24 February 2005 Application Open to Public Inspection

  Published as AU-A-2003304247

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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