PROJECTION LENS AND METHOD FOR SELECTION OF OPTICAL MATERIALS IN SUCH A LENS

Details for Australian Patent Application No. 2003304216 (hide)

Owner CARL ZEISS SMT AG

Inventors ENKISCH, Birgit; GRUNER, Toralf; GERHARD, Michael

Pub. Number AU-A-2003304216

PCT Number PCT/EP2003/0064

PCT Pub. Number WO2004/111690

Filing date 18 June 2003

Wipo publication date 4 January 2005

International Classifications

G02B 001/02 Optical elements characterised by the material of which they are made

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 013/24 Optical objectives specially designed for the purposes specified below - for reproducing or copying at short object distances

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

Event Publications

3 February 2005 Complete Application Filed

17 February 2005 Application Open to Public Inspection

  Published as AU-A-2003304216

9 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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