PLASMA-ENHANCED FILM DEPOSITION

Details for Australian Patent Application No. 2003304125 (hide)

Owner CARDINAL CG COMPANY

Inventors HARTIG, Klaus

Pub. Number AU-A-2003304125

PCT Number PCT/US2003/0419

PCT Pub. Number WO2004/101844

Priority 60/434,522 18.12.02 US

Filing date 18 December 2003

Wipo publication date 3 December 2004

International Classifications

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

C23C 016/503 Chemical deposition or plating by decomposition

Event Publications

6 January 2005 Complete Application Filed

  Priority application(s): 60/434,522 18.12.02 US

13 January 2005 Application Open to Public Inspection

  Published as AU-A-2003304125

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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