COMPOSITION AND METHOD USED FOR CHEMICAL MECHANICAL PLANARIZATION OF METALS

Details for Australian Patent Application No. 2003303677 (hide)

Owner AIR PRODUCTS AND CHEMICALS, INC.

Inventors CHANG, Song, Y.; EVANS, Mark; TAMBOLI, Dnyanesh; HYMES, Stephen, W.

Pub. Number AU-A-2003303677

PCT Number PCT/US2003/0412

PCT Pub. Number WO2004/063301

Priority 60/437,826 03.01.03 US; 10/744,285 23.12.03 US

Filing date 29 December 2003

Wipo publication date 10 August 2004

International Classifications

C09G 001/02 Polishing compositions

C09K 003/14 Materials not provided for elsewhere - Anti-slip materials

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 September 2004 Complete Application Filed

  Priority application(s): 60/437,826 03.01.03 US; 10/744,285 23.12.03 US

9 September 2004 Application Open to Public Inspection

  Published as AU-A-2003303677

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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