METHOD AND APPARATUS FOR SLOPE TO THRESHOLD CONVERSION FOR PROCESS STATE MONITORING AND ENDPOINT DETECTION

Details for Australian Patent Application No. 2003303494 (hide)

International Classifications

Event Publications

26 August 2004 Complete Application Filed

Priority application(s): 10/318,967 13.12.02 US

2 September 2004 Application Open to Public Inspection

Published as AU-A-2003303494

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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